PanelXPress™ (PXP) UHP manual gas panels make it easy for you to meet process, safety, purity, and schedule demands with both standard and custom configured options. The PanelXPress™ product line offers 2, 3, 4, 5, and 6-Valve standard designs which are compatible with a wide array of gases. You don’t have to wait to tackle the challenges of your gas delivery process because all PXP™ gas panels are available for quick delivery, and are easy to install.
Our XpressStick™ MFC gas stick is the missing link between pressurized gas and your vacuum chamber. Processes which include a combination of specialty gases, pressure, precise regulation, and vacuum require an understanding of multiple disciplines. This, combined with proper hardware selection, can make a seemingly simple task complicated. With the XpressStick™ you now have the ability to easily program a precise gas control system, so you can go from bottle to process in one simple step.
We manufacture bubblers for delivery of ultra-high purity (UHP) precursors to reaction zones during fabrication processes. Custom built bubblers to meet your specific equipment specifications are also available.
We offer a full range of standard and custom unions and couplings that provide leak free solutions for semiconductor fluid systems and processes, including ALD, CMP, wafer cleaning, copper deposition, cobalt deposition, CVD, and PVD.